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Cover of Chemical Mechanical Polishing in Silicon Processing

Chemical Mechanical Polishing in Silicon Processing

Academic Press Inc · 1999 · Hardcover

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About this book

Chemical Mechanical Polishing in Silicon Processing is available as a new copy. This hardcover edition from Academic Press Inc (1999) has 307 pages.

The book deals with Silicon, Grinding and polishing, Materials science and Semiconductor Physics.

Book details

ISBN-13
9780127521725
ISBN-10
0127521720
Publisher
Academic Press Inc
Published
1999
Binding
Hardcover
Pages
307
Language
English
Condition
New
Subject
Optics

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