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Cover of Lecture Notes on Principles of Plasma Processing

Lecture Notes on Principles of Plasma Processing

by Jane P. Chang, Francis F. Chen

Springer · 2003 · Paperback

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About this book

Published by Springer in 2003, Lecture Notes on Principles of Plasma Processing by Jane P. Chang & Francis F. Chen runs to 208 pages in paperback.

The book deals with Plasma chemistry, Plasma engineering, Plasma dynamics and Physics.

About the author: Francis F. Chen (born 1929).

Book details

ISBN-13
9780306474972
ISBN-10
0306474972
Authors
Jane P. Chang, Francis F. Chen
Publisher
Springer
Author dates
Francis F. Chen (born 1929)
Published
2003
Edition
2003 ed.
Binding
Paperback
Pages
208
Language
English
Condition
New
Subject
Optical materials

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