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Fabrication-Technology and Applications: 9
by N. Setter
Springer-Verlag New York Inc. · 2005
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Electroceramic-Based MEMS: Fabrication-Technology and Applications: 9 by N. Setter is a 414-page book published by Springer-Verlag New York Inc. in 2005. The book is part of the Electronic materials: science & technology series.
Its main subjects are Microelectromechanical systems.