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Cover of Ion Beam Assisted Film Growth

Ion Beam Assisted Film Growth

Elsevier Science Ltd · 1989

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About this book

The book is part of the Beam modification of materials series.

The book deals with Ion bombardment, Semiconductor films, Multilayered Thin films and Sputtering (Physics).

Book details

ISBN-13
9780444872807
ISBN-10
0444872809
Publisher
Elsevier Science Ltd
Published
1989
Series
Beam modification of materials
Pages
458
Language
English
Condition
New
Subject
Science, Tech & Medical

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