
Microsensing Networks for Sustainable Cities
Johannes Lambrechts, Saurabh Sinha
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by Joseph M. Steigerwald, Ronald J. Gutmann, Shyam P. Murarka
Wiley VCH · 1997
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Chemical Mechanical Planarization of Microelectronic Materials is written by Joseph M. Steigerwald, Ronald J. Gutmann & others. This edition is published by Wiley VCH (1997).
Its main subjects are Grinding and polishing, Materials, Microelectronics and Chemical mechanical planarization.