Physics of Radio-Frequency Plasmas

Low-temperature radio frequency plasmas play an essential role in many areas of advanced technology, the publisher notes. Applications range from micro-engineering to spacecraft propulsion and efficient sources of light.

The subject sits at the interface of physics, chemistry and engineering. This book focuses mostly on the physics of the subject, and the authors set it within that wider context.

The intended readers are postgraduate students and academics working in applied physics and electrical engineering.

Publisher: Cambridge University Press. ISBN-13: 9780521763004.