
Nano- and Microfabrication for Industrial and Biomedical Applications
Regina Luttge
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Elsevier · 2011
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Microfabrication for Industrial Applications is written by Regina Luttge. This edition from Elsevier (2011) has 312 pages.
Its main subjects are Microfabrication, Manufacturing processes, Microelectromechanical systems and Nanotechnology.