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Cover of Field Guide to Optical Lithography

Field Guide to Optical Lithography

by Chris A. MacK

Society of Photo Optical · 2006

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About this book

Published by Society of Photo Optical in 2006, Field Guide to Optical Lithography by Chris A. MacK runs to 136 pages.

Topics covered include Design and construction, Integrated circuits and Microlithography.

Book details

ISBN-13
9780819462077
ISBN-10
0819462071
Author
Chris A. MacK
Published
2006
Edition
Spi
Pages
136
Language
English
Condition
New

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