Fabrication of Silicon Microprobes for Optical Near-Field Applications

Name: Fabrication of Silicon Microprobes for Optical Near-Field Applications
Brand: CRC Press
SKU: 9780849311543
Price: 4060.00 INR
Availability: InStock

by Phan Ngoc Minh, Ono Takahito, Esashi Masayoshi

CRC Press

₹4,060

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From the publisher

Based upon the authors' own research and experiments, this book develops several technological approaches to using silicon micromachining techniques for fabricating microprobes without the drawbacks of conventional optical fiber probes. The authors have developed a simple, effective method for batch-process production of silicon cantilevered probes with apertures as small as 20 nanometers.

Description supplied by the publisher.