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Cover of Fabrication of Silicon Microprobes for Optical Near-Field Applications

Fabrication of Silicon Microprobes for Optical Near-Field Applications

by Phan Ngoc Minh, Ono Takahito, Esashi Masayoshi

CRC Press · 2002 · Hardcover

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About this book

Fabrication of Silicon Microprobes for Optical Near-Field Applications is written by Phan Ngoc Minh, Ono Takahito & others.

Topics covered include Micromachining, Silicon, Near-field microscopy and Microprobe analysis.

Book details

ISBN-13
9780849311543
ISBN-10
0849311543
Authors
Phan Ngoc Minh, Ono Takahito, Esashi Masayoshi
Publisher
CRC Press
Published
2002
Binding
Hardcover
Language
English
Condition
New