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Cover of Silicon Wafer Bonding Technology for VLSI and MEMS Applications

Silicon Wafer Bonding Technology for VLSI and MEMS Applications

by Subramanian S. Iyer

Institution of Engineering and Technology · 2001 · Hardcover

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About this book

Silicon Wafer Bonding Technology for VLSI and MEMS Applications is written by Subramanian S. Iyer.

Its main subjects are Very large scale integration, Silicon-on-insulator technology, Semiconductor wafers and Integrated circuits.

Book details

ISBN-13
9780852960394
ISBN-10
0852960395
Author
Subramanian S. Iyer
Publisher
Institution of Engineering and Technology
Published
2001
Binding
Hardcover
Pages
176
Language
English
Condition
New
Subject
Materials Engineering & Science

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