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Cover of Atomic Layer Deposition

Atomic Layer Deposition

Principles, Characteristics, and Nanotechnology Applications

by David Cameron, Tommi Kääriäinen, Marja-Leena Kääriäinen, Arthur Sherman

Wiley-Scrivener · 2013

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About this book

Atomic Layer Deposition: Principles, Characteristics, and Nanotechnology Applications by David Cameron, Tommi Kääriäinen & others is a 272-page book published by Wiley-Scrivener in 2013.

Topics covered include Chemical vapor deposition, Epitaxy, Microelectronics and Nanotechnology.

Book details

ISBN-13
9781118062777
ISBN-10
1118062779
Authors
David Cameron, Tommi Kääriäinen, Marja-Leena Kääriäinen, Arthur Sherman
Published
2013
Edition
2
Pages
272
Language
English
Condition
New
See all