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Cover of Nanoparticle Engineering for Chemical-Mechanical Planarization

Nanoparticle Engineering for Chemical-Mechanical Planarization

Fabrication of Next-Generation Nanodevices

by Ungyu Paik, Jea-Gun Park

CRC Pr I Llc · 2009 · Hardcover

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About this book

Nanoparticle Engineering for Chemical-Mechanical Planarization: Fabrication of Next-Generation Nanodevices by Ungyu Paik & Jea-Gun Park is a 224-page hardcover edition published by CRC Pr I Llc in 2009.

Topics covered include Chemical mechanical planarization, Nanoelectronics and Nanoparticles.

Book details

ISBN-13
9781420059113
ISBN-10
1420059114
Authors
Ungyu Paik, Jea-Gun Park
Publisher
CRC Pr I Llc
Published
2009
Edition
1
Binding
Hardcover
Pages
224
Language
English
Condition
New

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