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Cover of Materials & Process Integration for MEMS

Materials & Process Integration for MEMS

9

by Francis E. H. Tay

Springer-Verlag New York Inc. · 2010

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About this book

Materials & Process Integration for MEMS: 9 is written by Francis E. H. Tay. This edition from Springer-Verlag New York Inc. (2010) has 299 pages.

Its main subjects are Microelectromechanical systems, Micromechanics and Microstructure.

Book details

ISBN-13
9781441953032
ISBN-10
1441953035
Author
Francis E. H. Tay
Published
2010
Edition
Softcover reprint of hardcover 1st ed. 2002
Pages
299
Language
English
Condition
New
See all