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Cover of Reduced Thermal Processing for ULSI

Reduced Thermal Processing for ULSI

207

by Roland A. Levy

Springer · 2011

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About this book

Reduced Thermal Processing for ULSI: 207 is written by Roland A. Levy. This edition from Springer (2011) has 450 pages.

Topics covered include Crystallography, Physics, Solid state physics and Spectroscopy and Microscopy.

Book details

ISBN-13
9781461278573
ISBN-10
1461278570
Author
Roland A. Levy
Publisher
Springer
Published
2011
Edition
Softcover reprint of the original 1st ed. 1989
Pages
450
Language
English
Condition
New

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