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Cover of The Physics of Submicron Lithography

The Physics of Submicron Lithography

by Kamil A. Valiev

Springer-Verlag New York Inc. · 2012

₹15,355

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About this book

Published by Springer-Verlag New York Inc. in 2012, The Physics of Submicron Lithography by Kamil A.

The book deals with Computer engineering, Crystallography, Physics and Optical materials.

Book details

ISBN-13
9781461364610
ISBN-10
1461364612
Author
Kamil A. Valiev
Publisher
Springer-Verlag New York Inc.
Published
2012
Edition
Softcover reprint of the original 1st ed. 1992
Pages
493
Language
English
Condition
New
Subject
Crystallography

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