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Wafer Fab Exhaust Management
CRC Pr I Llc · 2005 · Hardcover
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Semiconductor Industry: Wafer Fab Exhaust Management by J. Michael Sherer is a 212-page hardcover edition published by CRC Pr I Llc in 2005.
The book deals with Air, Design and construction, Environmental aspects and Environmental aspects of Semiconductor industry.
About the author: J. Michael Sherer (born 1958).