Precision Nanometrology

Name: Precision Nanometrology: Sensors and Measuring Systems for Nanomanufacturing
Brand: Springer
SKU: 9781849962537
Price: 4475.00 INR
Availability: InStock

Sensors and Measuring Systems for Nanomanufacturing

by Wei Gao

Springer

₹4,475

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From the publisher

Precision Nanometrology describes the new field of precision nanometrology, which plays an important part in nanoscale manufacturing of semiconductors, optical elements, precision parts and similar items. It pays particular attention to the measurement of surface forms of precision workpieces and to stage motions of precision machines.

Description supplied by the publisher.