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Cover of Chemical-Mechanical Planarization of Semiconductor Materials

Chemical-Mechanical Planarization of Semiconductor Materials

69

by M. R. Oliver

Springer Nature · 2010

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About this book

Chemical-Mechanical Planarization of Semiconductor Materials: 69 by M. R.

Its main subjects are Physical organic chemistry, Electronics, Structural control (Engineering) and Surfaces (Physics).

Book details

ISBN-13
9783642077388
ISBN-10
3642077382
Author
M. R. Oliver
Publisher
Springer Nature
Published
2010
Edition
Softcover reprint of hardcover 1st ed. 2004
Pages
436
Language
English
Condition
New
Subject
Reference & Dictionaries

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