
Atomic Layer Deposition for Semiconductors
Cheol Seong
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10th International Workshop
by WMC 2009 (2009 Curtea-de-Argeș, Romania)
Springer-Verlag Berlin and Heidelberg GmbH & Co. K · 2010
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Published by Springer-Verlag Berlin and Heidelberg GmbH & Co. K in 2010, Membrane Computing: 10th International Workshop by Romania) WMC 2009 (2009 Curtea-de-Argeș runs to 487 pages. It belongs to the LNCS sublibrary series.
Its main subjects are Polynomialzeitalgorithmus, Komplexitätstheorie, Biocomputer and Congresses.