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Cover of Nanoimprint Lithography

Nanoimprint Lithography

An Enabling Process for Nanofabrication

by Weimin Zhou

Springer-Verlag Berlin and Heidelberg GmbH & Co. K · 2013

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About this book

K in 2013.

Its main subjects are Lithography.

Book details

ISBN-13
9783642344275
ISBN-10
3642344275
Author
Weimin Zhou
Publisher
Springer-Verlag Berlin and Heidelberg GmbH & Co. K
Published
2013
Edition
2013 ed.
Pages
249
Language
English
Condition
New
Subject
Science, Tech & Medical

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