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Cover of Investigation on SiGe Selective Epitaxy for Source and Drain Engineering in 22 nm CMOS Technology Node and Beyond

Investigation on SiGe Selective Epitaxy for Source and Drain Engineering in 22 nm CMOS Technology Node and Beyond

by Guilei Wang

Springer Verlag, Singapore · 2019 · Hardcover

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About this book

Investigation on SiGe Selective Epitaxy for Source and Drain Engineering in 22 nm CMOS Technology Node and Beyond by Guilei Wang is an 115-page hardcover edition published by Springer Verlag, Singapore in 2019.

Book details

ISBN-13
9789811500459
ISBN-10
9811500452
Author
Guilei Wang
Published
2019
Edition
1st ed. 2019
Binding
Hardcover
Pages
115
Language
English
Condition
New

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