Vacuum Microelectronics
Zhu, Wei.
₹18,053
Plasma Electronics
Applications in Microelectronic Device Fabrication
by Zoran Lj Petrovic, Toshiaki Makabe
CRC Press · 2006 · Hardcover
₹1,989
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About this book
Published by CRC Press in 2006, Plasma Electronics: Applications in Microelectronic Device Fabrication by Zoran Lj Petrovic & Toshiaki Makabe runs to 360 pages in hardcover. The book is part of the Series in plasma physics series.
Its main subjects are Plasma engineering, Mechanical engineering, Physics and Science.
Book details
- ISBN-13
- 9780750309769
- ISBN-10
- 0750309768
- Authors
- Zoran Lj Petrovic, Toshiaki Makabe
- Publisher
- CRC Press
- Published
- 2006
- Series
- Series in plasma physics
- Edition
- 1
- Binding
- Hardcover
- Pages
- 360
- Language
- English
- Condition
- New
- Subject
- Microelectronics
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